| Measurement
principle |
Heat
conduction Pirani / Cold cathode (inverted Magnetron) |
| Gas dependency |
depending on gas type |
| Measurement range mbar |
1000
– 5e-9 mbar |
| Measurement range Torr |
750 – 5e-9 Torr |
| max. overload |
10 bar abs., 16 bar abs. mit CERT31P |
| max. overload with CERT31P |
up to 16 bar abs. |
| Accuracy |
1000 – 10 mbar: approx. 30 % f. r. | 10 – 2e-3 mbar:
10 % f. r. | 2e-3 – 1e-8 mbar: 25 % f. r. |
| Repeatability |
10 – 1e-2 mbar: ca. 2% f. r. | 1e-2 – 1e-8 mbar: ca.
7% f. r. |
| Materials in contact with vacuum |
Stainless steel 1.4307, tungsten, nickel, glass,
molybdenum, Al₂O₃ ceramic |
| Filaments / anodes |
Molybdenium |
| anode voltage |
< 2.5 kV |
| Response time |
50 ms (switch-on cold cathode <2s) |
| Operating temperature |
+5…+60 °C |
| Storage temperature |
-40…+65 °C |
| Bake out temperature |
Max.
160 °C at the flange (voltage supply switched-off) |
| Voltage supply |
20 – 30 VDC |
| Power consumption |
Max. 3 W, add. 0.8 W for EtherCAT / relays /LCD, 1.6
W for Profinet |
| Output Singal SL |
0 – 10 VDC, min. 10 kΩ, measuring range 1,82 – 8,6
VDC, log. (Default) except EtherCAT, Profinet |
| Serial interface |
RS485:
9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity, EtherCAT, Profinet |
| Electrical connection |
RS485/0-10V:
SubD, 15-pole, male | RS485/EtherCAT/Profinet: 1x M12 A / 2x M12 D, female |
| Vacuum connection |
DN 25 ISO-KF (VSM77), DN 40 ISO-KF (VSM78), DN 40
CF-F (VSM79) |
| Protection class |
IP40,
IP54 mit connector XB15SL05 |
| Certification |
CSA, UL (cCSAus) |
| Dimensions |
139 x 69 x 48 mm (VSM77) |
| Weight |
555 g (VSM77) |
