Measurement
principle |
Heat
conduction Pirani |
Gas dependency |
depending on gas type |
Measurement range mbar |
1000
– 1e-4 mbar |
Measurement range Torr |
750 – 1e-4 Torr |
max. overload |
10 bar abs., 16 bar abs. mit CERT31P |
max. overload with CERT31P |
up to 16 bar abs. |
Accuracy |
1000 – 20 mbar: ca. 30 % f. r. | 20 – 0.002 mbar: 10
% f. r. |
Repeatability |
20 – 0.002 mbar: +-2 % f. r. |
Materials in contact with vacuum |
Stainless steel 1.4307, tungsten, nickel, glass |
Response time |
40 ms |
Operating temperature |
+5…+60 °C |
Storage temperature |
-40…+65 °C |
Bake out temperature |
Max.
150°C at the flange (voltage supply switched-off) |
Voltage supply |
20 – 30 VDC |
Power consumption |
Max. 2.5 W, add. 0.8 W f. EtherCAT/relays/ LCD, add.
1.6 W for Profinet |
Output Singal SL |
0-10 VDC, min. 10 kΩ, measuring range 1.5 to 8.5 VDC,
log., except for EtherCAT, Profinet |
Serial interface |
EtherCAT, Profinet, RS485: 9,6 kBd bis 115 kBd, 8 databit, 1 stopbit, no parity
EtherCAT, Profinet |
Switching output |
2x relay, pot. free, 50 VAC / 2 A or 30 VDC / 2 A,
max. 60 VA, except EtherCAT and Profinet |
Electrical connection |
RS485/0-10V:
SubD 15pole male | RS485/EtherCAT/Profinet: 1x M12 A / 2x M12 D female |
Vacuum connection |
DN 16 ISO-KF (VSP63), DN 16 CF-F (VSP64) |
Protection class |
IP40,
IP54 mit connector XB15SL05 |
Certification |
CSA, UL (cCSAus) |
Dimensions |
99 x 69 x 48 mm (VSP63) |
Weight |
190 g (VSP63) |