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VSP Vacuum Transducer
Art.-No. VSP-SL Series
모델명 Art.-No. VSP-SL Series
제조사 Thyracont Vacuum Instruments
원산지 독일
분류명 Digital Vacuum Transducer

* Specifications


Measurement principle Heat conduction Pirani
Gas dependency depending on gas type
Measurement range mbar 1000 – 1e-4 mbar
Measurement range Torr 750 – 1e-4 Torr
max. overload 10 bar abs., 16 bar abs. mit CERT31P
max. overload with CERT31P up to 16 bar abs.
Accuracy 1000 – 20 mbar: ca. 30 % f. r. | 20 – 0.002 mbar: 10 % f. r.
Repeatability 20 – 0.002 mbar: +-2 % f. r.
Materials in contact with vacuum Stainless steel 1.4307, tungsten, nickel, glass
Response time 40 ms
Operating temperature +5…+60 °C
Storage temperature -40…+65 °C
Bake out temperature Max. 150°C at the flange (voltage supply switched-off)
Voltage supply 20 – 30 VDC
Power consumption Max. 2.5 W, add. 0.8 W f. EtherCAT/relays/ LCD, add. 1.6 W for Profinet
Output Singal SL 0-10 VDC, min. 10 kΩ, measuring range 1.5 to 8.5 VDC, log., except for EtherCAT, Profinet
Serial interface EtherCATProfinetRS485: 9,6 kBd bis 115 kBd, 8 databit, 1 stopbit, no parity EtherCAT, Profinet
Switching output 2x relay, pot. free, 50 VAC / 2 A or 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet
Electrical connection RS485/0-10V: SubD 15pole male | RS485/EtherCAT/Profinet: 1x M12 A / 2x M12 D female
Vacuum connection DN 16 ISO-KF (VSP63), DN 16 CF-F (VSP64)
Protection class IP40, IP54 mit connector XB15SL05
Certification CSA, UL (cCSAus)
Dimensions 99 x 69 x 48 mm (VSP63)
Weight 190 g (VSP63)



파일명 확장자 다운로드
 Art.-No. VSP-SL Series[Brochure].pdf (2MB)


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